TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Zehetner, Johann
A1  - Seyringer, Dana
A1  - Serecunova, Stanislava
A1  - Gaso, Peter
A1  - Pudis, Dusan
A1  - Hotovy, Ivan
A1  - Mikolasek, Miroslav
A1  - Seyringer, Heinz
ED  - Jandura, Dano
ED  - Maniakova, Petra
ED  - Lettrichova, Ivana
ED  - Kovac, Jr., Jaroslav
T1  - Fabrication of passive and active photonic coupling structures using fs-laser ablation
T2  - Proceedings of ADEPT 2021. 9th International Conference on Advances in Electronic and Photonic Technologies. Podbanske, High Tatras, Slovakia. September 20-23, 2021
N2  - Femtosecond laser ablation on Si generates 2D ripple structures, known as laser induced periodic surface structures (LIPSS) and pinholes. We fabricated membranes with 20 to 50 μm thickness perforated by an array of tapered pinholes up to 5 μm in diameter and 10 to 20 μm spacing. Within several micrometer the pinholes transform into hollow photonic waveguides with constant diameter from 1μm to 2μm. Such structures offer a 3D photonic coupling device for polymer Y-branch- and MMI-splitter. We measured a considerable change of electrical resistivity for 500 ppm H2 in air using Si/SiO2/TiO2 substrates with 2D LIPSS. We propose to investigate 3D waveguide arrays also for photonic-chemical sensors.
KW  - Coupling structure
KW  - Fs-laser ablation
Y1  - 2021
SN  - 978-80-554-1806-3
SB  - 978-80-554-1806-3
SP  - 255
EP  - 258
PB  - University of Zilina in EDIS-Publishing Centre of UZ
CY  - Zilina
ER  -