@misc{PartelKasemannDinceretal.2018, author = {Stefan Partel and Stephan Kasemann and Can Dincer and Jochen Kieninger and Gerald Urban}, title = {US 2018/0106749 A1. Electrode structure and method of manufacturing an electrode structure. 19.04.2018}, url = {https://worldwide.espacenet.com/publicationDetails/biblio?FT=D\&date=20180419\&DB=EPODOC\&CC=US\&NR=2018106749A1\#}, institution = {Forschungszentrum Mikrotechnik}, type = {other}, year = {2018}, }