@article{DomkeEgleStrojetal.2020,
  author    = {Matthias Domke and Bernadette Egle and Sandra Stroj and Marius Bodea and Elisabeth Schwarz and Gernot Fasching},
  title     = {Ultrafast-laser dicing of thin silicon wafers: strategies to improve front- and backside breaking strength},
  series   = {Applied Physics A},
  volume    = {123. Jg.},
  number    = {H. 12},
  doi       = {10.1007/s00339-017-1374-7},
  year      = {2020},
  language  = {en}
}