TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Domke, Matthias
A1  - Egle, Bernadette
A1  - Stroj, Sandra
A1  - Bodea, Marius
A1  - Schwarz, Elisabeth
A1  - Fasching, Gernot
T1  - Ultrafast-laser dicing of thin silicon wafers: strategies to improve front- and backside breaking strength
JF  - Applied Physics A
Y1  - 2017
U6  - https://doi.org/10.1007/s00339-017-1374-7
DO  - https://doi.org/10.1007/s00339-017-1374-7
VL  - 123. Jg.
IS  - H. 12
SP  - 8
S1  - 8
ER  -