TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Domke, Matthias
A1  - Stroj, Sandra
A1  - Matylitsky, Victor
ED  - Makimura, Tetsuya
ED  - Raciukaitis, Gediminas
ED  - Molpeceres, Carlos
T1  - Laser material processing in the ablation-cooled regime: Ablation efficiency and quality using single fs-, bursts of fs-, and single ns-pulses
T2  - Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV. 4–6 February 2019. San Francisco, California, United States
Y1  - 2019
U6  - https://doi.org/10.1117/12.2514441
DO  - https://doi.org/10.1117/12.2514441
PB  - SPIE
CY  - Bellingham, Washington
ER  -