@phdthesis{Partel2016,
  author    = {Stefan Partel},
  title     = {Fabrication of interdigitated electrode arrays for biosensors by advanced mask aligner lithography},
  publisher = {Universit{\"a}t},
  address   = {Freiburg},
  pages     = {153},
  year      = {2016},
  language  = {en}
}