@inproceedings{ZehetnerVankoCholevaetal.2014,
  author    = {Zehetner, Johann and Vanko, Gabriel and Choleva, Pavlina and Dzuba, Jaroslav and Ryger, Ivan and Lalinsky, Tibor},
  title     = {Using of laser ablation technique in the processing technology of GaN/SiC based MEMS for extreme conditions},
  series = {ASDAM 2014. Conference proceedings. The tenth International Conference on Advanced Semiconductor Devices and Microsystems. Smolenice Castle, Slovakia. 20-22 October 2014},
  editor    = {Breza, Juraj and Donoval, Daniel and Vavrinsky, Erik},
  publisher = {IEEE},
  address   = {Piscataway, NJ},
  pages     = {4},
  year      = {2014},
  language  = {en}
}