@article{RankSentosaHarperetal.2021,
  author    = {Rank, Elisabet A. and Sentosa, Ryan and Harper, Danielle J. and Salas, Matthias and Gaugutz, Anna and Seyringer, Dana and Nevlacsil, Stefan and Maese-Novo, Alejandro and Eggeling, Moritz and Muellner, Paul and Hainberger, Rainer and Sagmeister, Martin and Kraft, Jochen and Leitgeb, Rainer A. and Drexler, Wolfgang},
  title     = {Toward optical coherence tomography on a chip: in vivo three-dimensional human retinal imaging using photonic integrated circuit-based arrayed waveguide gratings},
  series = {Light: Science \& Applications},
  volume    = {o.Jg.},
  journal   = {Light: Science \& Applications},
  number    = {Bd. 10/6},
  issn      = {2047-7538},
  doi       = {10.1038/s41377-020-00450-0},
  pages     = {15},
  year      = {2021},
  abstract  = {In this work, we present a significant step toward in vivo ophthalmic optical coherence tomography and angiography on a photonic integrated chip. The diffraction gratings used in spectral-domain optical coherence tomography can be replaced by photonic integrated circuits comprising an arrayed waveguide grating. Two arrayed waveguide grating designs with 256 channels were tested, which enabled the first chip-based optical coherence tomography and angiography in vivo three-dimensional human retinal measurements. Design 1 supports a bandwidth of 22 nm, with which a sensitivity of up to 91 dB (830 µW) and an axial resolution of 10.7 µm was measured. Design 2 supports a bandwidth of 48 nm, with which a sensitivity of 90 dB (480 µW) and an axial resolution of 6.5 µm was measured. The silicon nitride-based integrated optical waveguides were fabricated with a fully CMOS-compatible process, which allows their monolithic co-integration on top of an optoelectronic silicon chip. As a benchmark for chip-based optical coherence tomography, tomograms generated by a commercially available clinical spectral-domain optical coherence tomography system were compared to those acquired with on-chip gratings. The similarities in the tomograms demonstrate the significant clinical potential for further integration of optical coherence tomography on a chip system.},
  language  = {en}
}
@inproceedings{HainbergerMuellnerEggelingetal.2020,
  author    = {Hainberger, Rainer and Muellner, Paul and Eggeling, Moritz and Maese-Novo, Alejandro and Nevlacsil, Stefan and Schotter, J{\"o}rg and Vogelbacher, Florian and Kraft, Jochen and Sagmeister, Martin and Zhou, Xue and Huang, Jinhua and Li, Mingzhu and Jiang, Ke-Jian and Song, Yanlin and Seyringer, Dana and Rank, Elisabet and Drexler, Wolfgang},
  title     = {CMOS-compatible silicon nitride waveguide photonic building blocks and their application for optical coherence tomography and other sensing applications},
  series = {Integrated Optics: Devices, Materials, and Technologies XXIV. 3-6 February 2020. San Francisco, California, United States},
  booktitle = {Integrated Optics: Devices, Materials, and Technologies XXIV. 3-6 February 2020. San Francisco, California, United States},
  number    = {112830P},
  editor    = {Garcia-Blanco, Sonia M. and Cheben, Pavel},
  publisher = {SPIE},
  address   = {Bellingham, Washington},
  isbn      = {9781510633308},
  doi       = {10.1117/12.2543585},
  pages     = {12},
  year      = {2020},
  language  = {en}
}
@inproceedings{SagmeisterJessenigMuellneretal.2019,
  author    = {Sagmeister, Martin and Jessenig, Stefan and Muellner, Paul and Nevlacsil, Stefan and Maese-Novo, Alejandro and Eggeling, Moritz and Hainberger, Rainer and Seyringer, Dana and Drexler, Wolfgang and Rank, Elisabet and Kraft, Jochen},
  title     = {Development of a monolithically integrated, CMOS-compatible SiN photonics process flow for sensor and medical applications},
  series = {Interphotonics 2019. Book of abstracts. 2nd International Conference on Photonics Research. November 4-9 2019. Antalya, Turkey},
  booktitle = {Interphotonics 2019. Book of abstracts. 2nd International Conference on Photonics Research. November 4-9 2019. Antalya, Turkey},
  editor    = {Kayahan, Ersin and Oral, Ahmet Yavuz and Ak{\"o}z, Mehmet Emre and Aksan, Onur Alp and Cinar, Ibrahim},
  year      = {2019},
  abstract  = {Abstract: ams AG is a leading provider of sensing solutions developing semiconductor sensors in a wide variety of fields, with optical sensing as one of the key competences. Since integrated photonics is a promising technology for new sensor systems, ams AG has been developing processes for fully integrated CMOS-compatible photonic components based on Si3N4. This talk will provide an overview on the processing of basic photonic building blocks and their optical properties and performance. We will also give examples for applications in the fields of optical coherence tomography and opto-chemical gas sensing. In the 1980s photonics started its way for common use in telecommunication technology, using optical fiber technologies. In recent years, also a variety of photonic sensors has been proposed and developed. One of the major drawbacks of most of these photonic devices has been the lack of integration into existing (semiconductor) production processes, so far. This integration is feasible using SiN material systems to process monolithically integrated CMOS-compatible photonic sensors in the visible and near-infrared spectrum. We will present the basic processing steps for the SiN photonic technology, the development of some critical processing steps such as SiN deposition and SiN etching as well as several photonic components (waveguides, splitters, etc.) with their optical properties. One of the applications presented relates to optical coherence tomography (OCT), a fast growing imaging technique in ophthalmology. Drawbacks of existing OCT systems are their high costs as well as their bulkiness, which prevents a wider spread use of OCT systems. One way to overcome both cost and size issues is to integrate optical and electrical components on a single chip. Part of this work was carried out in the framework of the projects COHESION (funded by the Austrian Research Promotion Agency (FFG), no. 848588), OCTCHIP (funded by the EU' Horizon 2020 research and innovation programme, no. 688173), and COLODOR (M-ERA.NET transnational Call 2015, funded by the Austrian Research Promotion Agency (FFG), no.854066, and the Bundesministerium f{\"u}r Bildung und Forschung, Germany).},
  language  = {en}
}
@inproceedings{RankNevlacsilMuellneretal.2019,
  author    = {Rank, Elisabet A. and Nevlacsil, Stefan and M{\"u}llner, Paul and Hainberger, Rainer and Maese-Novo, Alejandro and D{\"u}lk, Marcus and Gloor, Stefan and V{\"o}lker, Matthias and Verwaal, Nanko and Meinhardt, Gerald and Sagmeister, Martin and Kraft, Jochen and Morrissey, Padraic and Jezzini, Moises and Quan, Zhiheng and O'Brien, Peter and Richter, Stefan and Kempe, Michael and Seyringer, Dana and Drexler, Wolfgang},
  title     = {Spectral domain and swept source optical coherence tomography on a photonic integrated circuit at 840nm for ophthalmic application},
  series = {Optical Coherence Imaging Techniques and Imaging in Scattering Media III. Event: European Conferences on Biomedical Optics, 2019, Munich, Germany},
  booktitle = {Optical Coherence Imaging Techniques and Imaging in Scattering Media III. Event: European Conferences on Biomedical Optics, 2019, Munich, Germany},
  editor    = {Wojtkowski, Maciej and Boppart, Stephen A. and Oh, Wang-Yuhl},
  publisher = {SPIE},
  address   = {Bellingham, Washington},
  isbn      = {978-1-5106-2849-6},
  doi       = {10.1117/12.2526903},
  pages     = {3},
  year      = {2019},
  language  = {en}
}
@article{SeyringerSagmeisterMaeseNovoetal.2019,
  author    = {Seyringer, Dana and Sagmeister, Martin and Maese-Novo, Alejandro and Eggeling, Moritz and Rank, Elisabet A. and Muellner, Paul and Hainberger, Rainer and Drexler, Wolfgang and Vlaskovic, Marko and Zimmermann, Horst and Meinhardt, Gerald and Kraft, Jochen},
  title     = {Technological verification of size-optimized 160-channel silicon nitride-based AWG-spectrometer for medical applications},
  series = {Applied Physics B},
  volume    = {125. Jg.},
  journal   = {Applied Physics B},
  number    = {H. 6/88},
  doi       = {10.1007/s00340-019-7192-1},
  pages     = {10},
  year      = {2019},
  abstract  = {We present the technological verification of a size-optimized 160-channel, 50-GHz silicon nitride-based AWG-spectrometer. The spectrometer was designed for TM-polarized light with a central wavelength of 850 nm applying our proprietary "AWG-Parameters" tool. For the simulations of AWG layout, the WDM PHASAR photonics tool from Optiwave was used. The simulated results show satisfying optical properties of the designed AWG-spectrometer. However, the high-channel count causes a large AWG size with standard design approaches. To solve this problem we designed a special taper enabling the reduction of AWG structure by about 15\% while keeping the same optical properties. The AWG design was fabricated and the measured spectra not only confirm the proposed size-reduction but also the improvement of optical properties of the size-optimized AWG.},
  language  = {en}
}
@inproceedings{SeyringerSagmeisterMaeseNovoetal.2019,
  author    = {Seyringer, Dana and Sagmeister, Martin and Maese-Novo, Alejandro and Eggeling, Moritz and Rank, Elisabet A. and Edlinger, Johannes and Muellner, Paul and Hainberger, Rainer and Drexler, Wolfgang and Kraft, Jochen and Koppitsch, Guenther and Meinhardt, Gerald and Vlaskovic, Marko and Zimmermann, Horst},
  title     = {Compact and high-resolution 256-channel silicon nitride based AWG-spectrometer for OCT on a chip},
  series = {ICTON 2019. 21st International Conference on Transparent Optical Networks. 9-13 July 2019, Angers, France},
  booktitle = {ICTON 2019. 21st International Conference on Transparent Optical Networks. 9-13 July 2019, Angers, France},
  editor    = {Jaworski, Marek and Marciniak, Marian},
  publisher = {National Institute of Telecommunications},
  address   = {Warsaw, Poland},
  isbn      = {978-1-7281-2779-8},
  doi       = {10.1109/ICTON.2019.8840473},
  pages     = {4},
  year      = {2019},
  abstract  = {We present design, simulation and technological verification of a compact 256-channel, 42-GHz silicon nitride based AWG-spectrometer. The spectrometer was designed for TM-polarized light with a central wavelength of 850 nm, applying "AWG-Parameters" tool. This design is based on a previous study of various AWG designs (8-channel, 100-GHz; 20-channel, 50-GHz; 40-channel, 50-GHz, 80-channel, 50-GHz and 160-channel, 50-GHz AWGs), which were all technologically verified. The spectrometer features small size and high resolution. It is integrated on OCT chip using standard CMOS processes. The SD-OCT system is developed to operate in a wavelength range from 800 nm to 900 nm, having 0.1 nm resolution.},
  language  = {en}
}
@inproceedings{SeyringerBurtscherEdlingeretal.2018,
  author    = {Seyringer, Dana and Burtscher, Catalina and Edlinger, Johannes and Drexler, Wolfgang and Rank, Elisabeth and Muellner, Paul and Hainberger, Rainer and Maese-Novo, Alejandro and Vlaskovic, Marko and Zimmermann, Horst and Kraft, Jochen and Koppitsch, G{\"u}nther and Sagmeister, Martin and Meinhardt, Gerald},
  title     = {Size reduction of high-channel Si3N4 based AWG-spectrometer for medical applications},
  series = {Nanoengineering: Fabrication, Properties, Optics, and Devices XV. 21-23 August 2018. San Diego, California, United States},
  booktitle = {Nanoengineering: Fabrication, Properties, Optics, and Devices XV. 21-23 August 2018. San Diego, California, United States},
  editor    = {Panchapakesan, Balaji and Sakdinawat, Anne and Attias, Andre-Jean and Dobisz, Elizabeth},
  publisher = {SPIE},
  address   = {Bellingham, Wash.},
  doi       = {10.1117/12.2319670},
  year      = {2018},
  language  = {en}
}