@article{HermannDezhdarHarderetal.2010,
  author    = {Hermann, Sonja and Dezhdar, Tara and Harder, Nils-Peter and Brendel, Rolf and Seibt, Michael and Stroj, Sandra},
  title     = {Impact of surface topography and laser pulse duration for laser ablation of solar cell front side passivating SiNx layers},
  series = {Journal of Applied Physics},
  volume    = {108. Jg.},
  number    = {H. 11},
  issn      = {0021-8979},
  doi       = {10.1063/1.3493204},
  pages     = {8},
  year      = {2010},
  language  = {en}
}