@article{PireddaStrojZissetal.2019, author = {Piredda, Giovanni and Stroj, Sandra and Ziss, Dorian and Stangl, Julian and Trotta, Rinaldo and Martin-Sanchez, Javier and Rastelli, Armando}, title = {Micro-machining of PMN-PT crystals with ultrashort laser pulses}, series = {Applied Physics A}, volume = {125. Jg.}, journal = {Applied Physics A}, number = {H. 3/201}, doi = {10.1007/s00339-019-2460-9}, pages = {11}, year = {2019}, abstract = {Lead-magnesium niobate lead titanate (PMN-PT) has been proven as an excellent material for sensing and actuating applications. The fabrication of advanced ultra-small PMN-PT-based devices relies on the availability of sophisticated procedures for the micro-machining of PMN-PT thin films or bulk substrates. Approaches reported up to date include chemical etching, excimer laser ablation, and ion milling. To ensure an excellent device performance, a key mandatory feature for a micro-machining process is to preserve as far as possible the crystalline quality of the substrates; in other words, the fabrication method must induce a low density of cracks and other kind of defects. In this work, we demonstrate a relatively fast procedure for the fabrication of high-quality PMN-PT micro-machined actuators employing green femtosecond laser pulses. The fabricated devices feature the absence of extended cracks and well-defined edges with relatively low roughness, which is advantageous for the further integration of nanomaterials onto the piezoelectric actuators.}, language = {en} } @article{YuanSchwendtnerTrottaetal.2019, author = {Yuan, Xueyong and Schwendtner, Michael and Trotta, Rinaldo and Huo, Yongheng and Mart{\´i}n-S{\´a}nchez, Javier and Piredda, Giovanni and Huang, Huiying and Edlinger, Johannes and Diskus, Christian and Schmidt, Oliver G. and Jakoby, Bernhard and Krenner, Hubert J. and Rastelli, Armando}, title = {A frequency-tunable nanomembrane mechanical oscillator with embedded quantum dots}, series = {Applied Physics Letters}, volume = {115. Jg.}, journal = {Applied Physics Letters}, number = {H. 18/181902}, doi = {10.1063/1.5126670}, pages = {17}, year = {2019}, language = {en} }