TY  - JOUR
A1  - Piredda, Giovanni
A1  - Stroj, Sandra
A1  - Ziss, Dorian
A1  - Stangl, Julian
A1  - Trotta, Rinaldo
A1  - Martin-Sanchez, Javier
A1  - Rastelli, Armando
T1  - Micro-machining of PMN-PT crystals with ultrashort laser pulses
JF  - Applied Physics A
N2  - Lead–magnesium niobate lead titanate (PMN-PT) has been proven as an excellent material for sensing and actuating applications. The fabrication of advanced ultra-small PMN-PT-based devices relies on the availability of sophisticated procedures for the micro-machining of PMN-PT thin films or bulk substrates. Approaches reported up to date include chemical etching, excimer laser ablation, and ion milling. To ensure an excellent device performance, a key mandatory feature for a micro-machining process is to preserve as far as possible the crystalline quality of the substrates; in other words, the fabrication method must induce a low density of cracks and other kind of defects. In this work, we demonstrate a relatively fast procedure for the fabrication of high-quality PMN-PT micro-machined actuators employing green femtosecond laser pulses. The fabricated devices feature the absence of extended cracks and well-defined edges with relatively low roughness, which is advantageous for the further integration of nanomaterials onto the piezoelectric actuators.
Y1  - 2019
U6  - http://dx.doi.org/10.1007/s00339-019-2460-9
VL  - 125. Jg.
IS  - H. 3/201
ER  - 
TY  - JOUR
A1  - Yuan, Xueyong
A1  - Schwendtner, Michael
A1  - Trotta, Rinaldo
A1  - Huo, Yongheng
A1  - Martín-Sánchez, Javier
A1  - Piredda, Giovanni
A1  - Huang, Huiying
A1  - Edlinger, Johannes
A1  - Diskus, Christian
A1  - Schmidt, Oliver G.
A1  - Jakoby, Bernhard
A1  - Krenner, Hubert J.
A1  - Rastelli, Armando
T1  - A frequency-tunable nanomembrane mechanical oscillator with embedded quantum dots
JF  - Applied Physics Letters
Y1  - 2019
U6  - http://dx.doi.org/10.1063/1.5126670
VL  - 115. Jg.
IS  - H. 18/181902
ER  -