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Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques

  • The properties of diamond make it an attractive material for MEMS and sensor devices. We present the feasibility to fabricate membranes and cantilevers made of nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates using microwave chemical vapour deposition (MWCVD). The patterning of micromechanical structures was performed by a combined process of femtosecond laser ablation and wet etching. We designed cantilever structures with varying lengths and widths (25, 50, 100, 200 and 300 μm). The cantilevers were made in a symmetric left- and right-hand configuration. An additional laser treatment was used to modify the mechanical properties of the left-hand cantilever. The deflection of the laser-treated, and non-treated sections was measured. The global mechanical system properties were simulated and corresponded with high accuracy to the measured results of deflection.

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Author:Johann ZehetnerORCiD, Gabriel Vanko, Tibor Izsak, Eva Kováčová, Milan Drzik, Fadi DohnalORCiD, Alexander Kromka
Parent Title (English):2022 14th International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM): Smolenice, Slovakia, 23-26 October 2022
Place of publication:Piscataway, NJ
Document Type:Conference Proceeding
Year of publication:2022
Release Date:2023/03/03
Tag:Measurement by laser beam; Micromechanical devices; Semiconductor device measurement; Semiconductor lasers; Wet etching
Number of pages:4
First Page:195
Last Page:198
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
DDC classes:600 Technik, Medizin, angewandte Wissenschaften
Open Access?:nein
Peer review:wiss. Beitrag, peer-reviewed
Publicationlist:Zehetner, Johann
Dohnal, Fadi