Volltext-Downloads (blau) und Frontdoor-Views (grau)

Recent challenges in micromachining of wide-bandgap materials and fabrication of mems for harsh environments

  • The properties of SiC and diamond make them attractive materials for MEMS and sensor devices. We innovated specific laser ablation techniques to fabricate membranes and cantilevers made of SiC or nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates by microwave chemical vapour deposition (MWCVD). We started research to generate surface moulds to grow corrugated diamond films for membranes and cantilevers. A software tool was developed to support the design of micromechanical cantilevers. We can measure deformation and resonant frequency of diamond cantilevers and identify the global mechanical properties. A benchmark against finite element simulations enables an inverse identification of the specific system parameters and simplifies the characterization procedure.

Export metadata

Additional Services

Share in Twitter Search Google Scholar
Author:Johann ZehetnerORCiD, Gabriel Vanko, Fadi DohnalORCiD, Tibor Izsák, Milan Drzik, Alexander Kromka
Parent Title (English):Proceeding of the International Conference on Advances in Electronic and Photonic Technologies (ADEPT 2022): Tatranská Lomnica, Slovakia, June 20th-24th, 2022.
Publisher:EDIS-Publishing Centre of UZ
Place of publication:Žilina
Document Type:Conference Proceeding
Year of publication:2022
Release Date:2023/03/03
Tag:HEMT; MEMS; diamond; harsh environment; laser ablation
Number of pages:6
First Page:7
Last Page:12
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
DDC classes:600 Technik, Medizin, angewandte Wissenschaften
Publicationlist:Zehetner, Johann
Dohnal, Fadi