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Preparation of laser induced periodic surface structures (LIPSS) and their transfer into sensing elements

  • Semiconducting metal oxides are widely used for solar cells, poto-catalysis, bio-active materials and gas sensors. Besides the material properties of the used semiconductor,the specific surface topology of the sensor determines the device performance. We investigate the preparation and transfer suitable metals onto LIPPS structures on glass for gas sensing applications.

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Author:Johann ZehetnerORCiD, Ivan Hotovy, P. Ondrejka, Vlastimil Rehacek, I. Kostic, Miroslav Mikolasek, Dana SeyringerORCiD, Fadi DohnalORCiD
Parent Title (English):Proceedings of 12th Solid State Surfaces and Interfaces: Smolenice, Slovak Republic, November 21-23, 2022.
Publisher:Comenius University Bratislava
Place of publication:Bratislava
Document Type:Conference Proceeding
Year of publication:2022
Release Date:2023/03/03
Number of pages:2
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
DDC classes:600 Technik, Medizin, angewandte Wissenschaften
Publicationlist:Seyringer, Dana
Zehetner, Johann
Dohnal, Fadi