Optimization of 3D 1×4 multimode interference splitter based on polymer material platform
- This paper presents design, simulation, and optimization of the three-dimensional 1×4 optical multimode interference splitter using IP-Dip polymer as a core and polydimethylsiloxane (PDMS) Sylgard 184 as a cladding. The splitter was simulated by using beam propagation method in BeamPROP simulation engine of RSoft photonic tool and optimized for an operating wavelength of 1.55 µm. According to the minimum insertion loss, the dimensions of the MMI coupler and the length of the whole MMI splitter structure were optimized applying a waveguide with a core size of 4×4 µm2. The objective of the study is to create a design for fabrication by three-dimensional direct laser writing optical lithography.
Author: | Stanislava Serecunova, Dana Seyringer, Dusan Pudis, Tomas Mizera, Frantisek Uherek, Heinz Seyringer |
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DOI: | https://doi.org/https://doi.org/10.1063/5.0135780 |
ISBN: | 978-0-7354-4479-9 |
Parent Title (English): | Applied Physics of Condensed Matter (APCOM 2022), 22–24 June 2022, Štrbské Pleso, Slovak Republic |
Publisher: | AIP Publishing |
Place of publication: | Melville, NY |
Document Type: | Article |
Language: | English |
Year of publication: | 2023 |
Release Date: | 2023/05/22 |
Tag: | laser writing optical lithography |
Volume: | 2778 |
Issue: | 1 |
Number of pages: | 6 |
First Page: | 030009-1 |
Last Page: | 030009-5 |
Organisationseinheit: | Forschung |
Forschung / Forschungszentrum Mikrotechnik | |
DDC classes: | 500 Naturwissenschaften und Mathematik |
JEL-Classification: | Z Other Special Topics |
Open Access?: | nein |
Peer review: | wiss. Beitrag, nicht peer-reviewed |
Publicationlist: | Seyringer, Dana |
Seyringer, Heinz |