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Front-side diamond deposition on the GaN membranes

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Author:Tibor Izsak, Gabriel Vanko, Milan Drzik, Stephan Kasemann, Johann ZehetnerORCiD, Marian Vojs, Bohumir Zatko, Stepan Potocky, Alexander Kromka
DOI:https://doi.org/10.1109/ASDAM50306.2020.9393833
ISBN:978-1-7281-9776-0
ISBN:978-1-6654-4616-7
Parent Title (English):ASDAM 2020. The 13th International Conference on Advanced Semiconductor Devices and Microsystems. Smolenice Castle, Slovakia. October 11-14, 2020
Publisher:IEEE
Place of publication:Piscataway, NJ
Editor:Tibor Izsak, Gabriel Vanko
Document Type:Conference Proceeding
Language:English
Year of publication:2020
Release Date:2022/02/28
First Page:42
Last Page:45
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Open Access?:nein
Publicationlist:Kasemann, Stephan
Zehetner, Johann