Laser material processing in the ablation-cooled regime: Ablation efficiency and quality using single fs-, bursts of fs-, and single ns-pulses
Author: | Matthias Domke, Sandra StrojORCiD, Victor Matylitsky |
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DOI: | https://doi.org/10.1117/12.2514441 |
Parent Title (English): | Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV. 4–6 February 2019. San Francisco, California, United States |
Publication Series: | Proceedings of SPIE, Volume 10905 |
Publisher: | SPIE |
Place of publication: | Bellingham, Washington |
Editor: | Tetsuya Makimura, Gediminas Raciukaitis, Carlos Molpeceres |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2019 |
Release Date: | 2020/01/28 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
DDC classes: | 600 Technik, Medizin, angewandte Wissenschaften / 620 Ingenieurwissenschaften und Maschinenbau / 621 Angewandte Physik |
Open Access?: | nein |
Peer review: | wiss. Beitrag, nicht peer-reviewed |
Publicationlist: | Domke, Matthias |
Stroj, Sandra |