Conditions for random and periodic hole formations during surface ablation of silicon with ultrashort pulsed lasers
Author: | Matthias Domke |
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Parent Title (English): | Frontiers in Ultrafast Optics. Biomedical, Scientific, and Industrial Applications XV. 8–10 February 2015. San Francisco, California, United States |
Publisher: | SPIE |
Place of publication: | Bellingham, Wash. |
Editor: | Alexander Heisterkamp, Peter R. Herman, Michel Meunier, Stefan Nolte |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2015 |
Release Date: | 2018/11/22 |
Volume: | 9355 |
Number of pages: | 7 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Forschung / Josef Ressel Zentrum für Materialbearbeitung | |
Publicationlist: | Domke, Matthias |