Micro structuring of membranes for sensor devices on different nulk materials by femtosecond laser ablation
Author: | Johann ZehetnerORCiD, Gabriel Vanko, Jaroslav Dzuba, Tibor Lalinsky, Michal Lucki, Stanislav Kraus |
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Parent Title (English): | Proceedings of ADEPT. 4th International Conference on Advances in Electronic and Photonic Technologies. Tatranska Lomnica, High Tatras, Slovakia. June 20 - 23, 2016 |
Publisher: | University of Zilina |
Place of publication: | Zilina |
Editor: | Jaroslav Kovac, Miroslav Michalka, Sona Kovacova, Daniel Jandura |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2016 |
Release Date: | 2018/11/22 |
First Page: | 55 |
Last Page: | 58 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Publicationlist: | Zehetner, Johann |