Micro structuring of bulk SiC substrates by femtosecond laser ablation
Author: | Johann ZehetnerORCiD, Gabriel Vanko, Jaroslav Dzuba, Tibor Lalinsky, Michal Lucki, Stanislav Kraus |
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Parent Title (English): | Proceedings of the 22nd International Conference on Applied Physics of Condensed Matter (APCOM 2016). June 22 - 24, 2016. Hotel Patria, Strbske Pleso, Slovak Republic |
Publisher: | Slovenska Technicka Univerzita |
Place of publication: | Bratislava |
Editor: | Jan Vajda, Igor Jamnicky |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2016 |
Release Date: | 2018/11/22 |
First Page: | 302 |
Last Page: | 306 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Publicationlist: | Zehetner, Johann |