Conditions for random and periodic hole formations during surface ablation of silicon with ultrashort pulsed lasers
| Author: | Matthias Domke |
|---|---|
| Parent Title (English): | Frontiers in Ultrafast Optics. Biomedical, Scientific, and Industrial Applications XV. 8–10 February 2015. San Francisco, California, United States |
| Publisher: | SPIE |
| Place of publication: | Bellingham, Wash. |
| Editor: | Alexander Heisterkamp, Peter R. Herman, Michel Meunier, Stefan Nolte |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of publication: | 2015 |
| Release Date: | 2018/11/22 |
| Volume: | 9355 |
| Number of pages: | 7 |
| Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
| Forschung / Josef Ressel Zentrum für Materialbearbeitung | |
| Publicationlist: | Domke, Matthias |
