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UV-femtosecond laser ablation of SrTiO3 single crystals

  • We have investigated the ablation behaviour of single crystal SrTiO3 <100> with focus on the influence of the pulse duration at a wavelength of 248 nm. The experiments were performed with KrF-excimer lasers with pulse durations of 34 ns and 500 fs, respectively. Femtosecond-ablation turns out to be more efficient by one order of magnitude and to eliminate the known problem of cracking of SrTiO3 during laser machining with longer pulses. In addition, the cavities ablated with femtosecond pulses display a smoother surface with no indication of melting and well-defined, sharp edges. These effects can be explained by the reduced thermal shock effect on the material by using ultrashort pulses.

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Metadaten
Author:Sandra Zoppel, David Gray, Maria Farsari, Robert Merz, Georg A. Reider, Costas Fotakis
DOI:https://doi.org/10.1088/1742-6596/59/1/130
Parent Title (English):Journal of Physics: Conference Series
Document Type:Article
Language:English
Year of publication:2007
Release Date:2020/12/22
Volume:o.Jg.
Issue:Bd. 59: Eighth International Conference on Laser Ablation. Banff, Canada. 11–16 September 2005
Article Number:130
First Page:610
Last Page:615
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
DDC classes:500 Naturwissenschaften und Mathematik / 530 Physik
Open Access?:ja
Peer review:wiss. Beitrag, peer-reviewed
Publicationlist:Stroj, Sandra
Merz, Robert
Licence (German):License LogoCreative Commons - CC BY - NC - SA - 4.0 International - Attribution - NonCommercial –ShareAlike - Namensnennung - Nicht kommerziell - Weitergabe unter gleichen Bedingungen