UV-femtosecond laser ablation of SrTiO3 single crystals
- We have investigated the ablation behaviour of single crystal SrTiO3 <100> with focus on the influence of the pulse duration at a wavelength of 248 nm. The experiments were performed with KrF-excimer lasers with pulse durations of 34 ns and 500 fs, respectively. Femtosecond-ablation turns out to be more efficient by one order of magnitude and to eliminate the known problem of cracking of SrTiO3 during laser machining with longer pulses. In addition, the cavities ablated with femtosecond pulses display a smoother surface with no indication of melting and well-defined, sharp edges. These effects can be explained by the reduced thermal shock effect on the material by using ultrashort pulses.
Author: | Sandra Zoppel, David Gray, Maria Farsari, Robert Merz, Georg A. Reider, Costas Fotakis |
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DOI: | https://doi.org/10.1088/1742-6596/59/1/130 |
Parent Title (English): | Journal of Physics: Conference Series |
Document Type: | Article |
Language: | English |
Year of publication: | 2007 |
Release Date: | 2020/12/22 |
Volume: | o.Jg. |
Issue: | Bd. 59: Eighth International Conference on Laser Ablation. Banff, Canada. 11–16 September 2005 |
Article Number: | 130 |
First Page: | 610 |
Last Page: | 615 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
DDC classes: | 500 Naturwissenschaften und Mathematik / 530 Physik |
Open Access?: | ja |
Peer review: | wiss. Beitrag, peer-reviewed |
Publicationlist: | Stroj, Sandra |
Merz, Robert | |
Licence (German): | Creative Commons - CC BY - NC - SA - 4.0 International - Attribution - NonCommercial –ShareAlike - Namensnennung - Nicht kommerziell - Weitergabe unter gleichen Bedingungen |