Selective ablation of thin Mo and TCO films with femtosecond laser pulses for structuring thin film solar cells
Author: | Sandra Zoppel, Heinz P. Huber, Georg A. Reider |
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DOI: | https://doi.org/10.1007/s00339-007-4158-7 |
Parent Title (English): | Applied Physics A |
Document Type: | Article |
Language: | English |
Year of publication: | 2007 |
Release Date: | 2020/12/22 |
Volume: | 89. Jg. |
Issue: | H. 1 |
First Page: | 161 |
Last Page: | 163 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
DDC classes: | 500 Naturwissenschaften und Mathematik / 530 Physik |
Open Access?: | nein |
Peer review: | wiss. Beitrag, peer-reviewed |
Publicationlist: | Stroj, Sandra |