Study of selective wet etching of titanium towards copper in hydrofluoric free etchant
| Author: | Volha Matylitskaya, Stefan Partel, Stephan Kasemann |
|---|---|
| Parent Title (English): | Proceedings of the 21st International Conference on Applied Physics of Condensed Matter (APCOM 2015) and of the Scientific Conference on Advanced Fast Reactors. June 24 - 26, 2015. Strbske Pleso, Slovak Republic |
| Publisher: | Nakl. STU |
| Place of publication: | Bratislava |
| Editor: | Jan Vajda, Igor Jamnicky |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of publication: | 2015 |
| Release Date: | 2018/11/22 |
| First Page: | 272 |
| Last Page: | 276 |
| Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
| Publicationlist: | Kasemann, Stephan |
| Matylitskaya, Volha | |
| Partel, Stefan |
