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Laser material processing in the ablation-cooled regime: Ablation efficiency and quality using single fs-, bursts of fs-, and single ns-pulses

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Author:Matthias Domke, Sandra Stroj, Victor Matylitsky
Parent Title (English):Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV. 4–6 February 2019. San Francisco, California, United States
Publication Series:Proceedings of SPIE, Volume 10905
Place of publication:Bellingham, Washington
Editor:Tetsuya Makimura, Gediminas Raciukaitis, Carlos Molpeceres
Document Type:Conference Proceeding
Year of publication:2019
Release Date:2020/01/28
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
DDC classes:600 Technik, Medizin, angewandte Wissenschaften / 620 Ingenieurwissenschaften und Maschinenbau / 621 Angewandte Physik
Open Access?:nein
Peer review:wiss. Beitrag, nicht peer-reviewed
Publicationlist:Domke, Matthias
Stroj, Sandra
Bibliographie 2019