Femtosecond laser quantized structuring in thin SiOx film. Paper STh3Q.4
Author: | Stephen Ho, Matthias Domke, David Roper, Heinz Huber, Peter R. Herman |
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Parent Title (English): | Conference on Lasers and Electro-Optics (2016). CLEO: Science and Innovations. San Jose, California United States. 5–10 June 2016 |
Publisher: | Optical Society of America |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2016 |
Release Date: | 2018/11/22 |
Tag: | Femtosecond phenomena; Laser materials processing; Subwavelength structures; nanostructures |
Number of pages: | 2 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Forschung / Josef Ressel Zentrum für Materialbearbeitung | |
Publicationlist: | Domke, Matthias |