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In-situ measurement and characterization of photoresists during development

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Metadaten
Author:Stefan Partel, Markus Mayer, Kristian Motzek
Parent Title (English):SPIE Newsroom
Document Type:Article
Language:English
Year of publication:2012
Release Date:2018/11/22
Number of pages:3
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Publicationlist:Partel, Stefan