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The combination of direct and confined laser ablation mechanisms for the selective structuring of thin silicon nitride layers
Author: | Stephan Rapp, Gerrit Heinrich, Matthias Domke, Heinz P. Huber |
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DOI: | https://doi.org/10.1016/j.phpro.2014.08.011 |
Parent Title (English): | 8th International Conference on Laser Assisted Net Shape Engineering LANE 2014 |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2014 |
Release Date: | 2018/11/22 |
Tag: | Pump-probe microscopy; SiNx thin films; confined laser ablation |
Volume: | o.Jg. |
First Page: | 998 |
Last Page: | 1006 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Publicationlist: | Domke, Matthias |