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Impact of surface topography and laser pulse duration for laser ablation of solar cell front side passivating SiNx layers

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Metadaten
Author:Sonja Hermann, Tara Dezhdar, Nils-Peter Harder, Rolf Brendel, Michael Seibt, Sandra Stroj
DOI:https://doi.org/10.1063/1.3493204
ISSN:0021-8979
Parent Title (English):Journal of Applied Physics
Document Type:Article
Language:English
Year of publication:2010
Release Date:2020/12/22
Tag:Diodes; High-speed optical techniques; Laser ablation; Passivation; Scanning electron microscopy
Volume:108. Jg.
Issue:H. 11/114514
Number og pages:8
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
DDC classes:500 Naturwissenschaften und Mathematik
Open Access?:nein
Peer review:wiss. Beitrag, peer-reviewed
Publicationlist:Stroj, Sandra