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Single pulse femtosecond laser ablation of silicon – a comparison between experimental and simulated two-dimensional ablation profiles

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Author:Regina Moser, Matthias Domke, Jan Winter, Heinz Huber, Gerd Marowsky
DOI:https://doi.org/10.1515/aot-2018-0013
ISSN:2192-8576
Parent Title (English):Advanced Optical Technologies
Document Type:Article
Language:English
Year of publication:2018
Release Date:2019/08/01
Tag:femtosecond laser ablation; silicon laser ablation; two-dimensional morphology; two-temperature model
Volume:7. Jg
Issue:H. 4
First Page:255
Last Page:264
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Publicationlist:Domke, Matthias