Volltext-Downloads (blau) und Frontdoor-Views (grau)
The search result changed since you submitted your search request. Documents might be displayed in a different sort order.
  • search hit 2 of 530
Back to Result List

Micromachining of silicon carbide using femtosecond lasers

  • We have demonstrated micromachining of bulk 3C silicon carbide (3C- SiC) wafers by employing 1028nm wavelength femtosecond laser pulses of energy less than 10 nJ directly from a femtosecond laser oscillator, thus eliminating the need for an amplified system and increasing the micromachining speed by more than four orders of magnitude.

Download full text files

Export metadata

Additional Services

Search Google Scholar
Metadaten
Author:Maria Farsari, George Filippidis, Sandra Zoppel, Georg A. Reider, Costas Fotakis
DOI:https://doi.org/10.1088/1742-6596/59/1/018
Parent Title (English):Journal of Physics: Conference Series
Document Type:Article
Language:English
Year of publication:2007
Release Date:2020/12/22
Volume:o.Jg.
Issue:Bd. 59: Eighth International Conference on Laser Ablation. Banff, Canada. 11–16 September 2005
Article Number:018
First Page:84
Last Page:87
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
DDC classes:500 Naturwissenschaften und Mathematik / 530 Physik
Open Access?:ja
Peer review:wiss. Beitrag, peer-reviewed
Publicationlist:Stroj, Sandra
Licence (German):License LogoCreative Commons - CC BY - NC - SA - 4.0 International - Attribution - NonCommercial –ShareAlike - Namensnennung - Nicht kommerziell - Weitergabe unter gleichen Bedingungen