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Controlling depth and distance of the hole formations at the bottom of laser-scribed trenches in silicon using fs-pulses

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Metadaten
Author:Matthias Domke, Bernadette Egle, Giovanni Piredda, Gernot Fasching, Marius Bodea, Elisabeth Schwarz
Parent Title (English):Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX. 9–12 February 2015. San Francisco, California, United States
Publisher:SPIE
Place of publication:Bellingham, Wash.
Editor:Stephan Roth, Yoshiki Nakata, Beat Neuenschwander, Xianfan Xu
Document Type:Conference Proceeding
Language:English
Year of publication:2015
Release Date:2018/11/22
Volume:9350
Number of pages:6
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Forschung / Josef Ressel Zentrum für Materialbearbeitung
Publicationlist:Domke, Matthias
Piredda, Giovanni