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Metadaten
Author:Dana SeyringerORCiD
ISBN:978-1-5106-0359-2
Parent Title (English):SPIE.Spotlight
Publisher:SPIE
Place of publication:Bellingham, Wash.
Document Type:Book
Language:English
Year of publication:2016
Release Date:2018/11/22
Number of pages:V, 71
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Publicationlist:Seyringer, Dana