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Femtosecond laser processing of membranes for sensor devices on different bulk materials

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Metadaten
Author:Johann Zehetner, Gabriel Vanko, Jaroslav Dzuba, Tibor Lalinsky
DOI:https://doi.org/10.15598/aeee.v15i3.2033
Parent Title (English):Advances in Electrical and Electronic Engineering
Document Type:Article
Language:English
Year of publication:2017
Release Date:2018/11/22
Volume:15. Jg.
Issue:H. 3
First Page:561
Last Page:568
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Publicationlist:Zehetner, Johann