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Fabrication of diamond membranes by femtosecond laser ablation for MEMS sensor applications

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Metadaten
Author:Johann ZehetnerORCiD, Alexander Kromka, Tibor Izsak, Gabriel Vanko, Lenka Gajdosova, Stephan Kasemann
DOI:https://doi.org/10.3390/proceedings2020056013
ISSN:2504-3900
Parent Title (English):Proceedings
Document Type:Article
Language:English
Year of publication:2020
Release Date:2022/02/28
Volume:o.Jg.
Issue:Bd. 56: 4th International Conference nanoFIS 2020 - Functional Integrated nanoSystems
Article Number:13
Number of pages:3
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Open Access?:ja
Peer review:wiss. Beitrag, nicht peer-reviewed
Publicationlist:Gajdosova, Lenka
Kasemann, Stephan
Zehetner, Johann