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Selective ablation of thin Mo and TCO films with femtosecond laser pulses for structuring thin film solar cells

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Metadaten
Author:Sandra Zoppel, Heinz P. Huber, Georg A. Reider
DOI:https://doi.org/10.1007/s00339-007-4158-7
Parent Title (English):Applied Physics A
Document Type:Article
Language:English
Year of publication:2007
Release Date:2020/12/22
Volume:89. Jg.
Issue:H. 1
First Page:161
Last Page:163
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
DDC classes:500 Naturwissenschaften und Mathematik / 530 Physik
Open Access?:nein
Peer review:wiss. Beitrag, peer-reviewed
Publicationlist:Stroj, Sandra