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Fabrication process development for a high sensitive electrochemical IDA sensor

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Author:Stefan Partel, Markus Mayer, Peter Hudek, Can Dincer, Jochen Kieninger, Gerhard A. Urban, Kristian Motzek, Ladislav Matay
DOI:https://doi.org/10.1016/j.mee.2012.03.028
ISSN:0167-9317
Parent Title (English):Microelectronic Engineering
Document Type:Article
Language:English
Year of publication:2011
Release Date:2018/11/22
Volume:o.Jg.
Issue:Bd. 97
First Page:235
Last Page:240
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Publicationlist:Partel, Stefan