Measurement of the AlGaN/GaN membrane piezoelectric response by pressure loading
Author: | Milan Drzik, Jaroslav Dzuba, Gabriel Vanko, Peter Hudek, Pavlina Choleva, Ivan Ryger, Tibor Lalinsky |
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Parent Title (English): | 39th International Conference on MNE, 16 to 19 September 2013, London |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2013 |
Release Date: | 2018/11/22 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |