In-situ measurement and characterization of photoresists during development
| Author: | Stefan Partel, Markus Mayer, Kristian Motzek |
|---|---|
| Parent Title (English): | SPIE Newsroom |
| Document Type: | Article |
| Language: | English |
| Year of publication: | 2012 |
| Release Date: | 2018/11/22 |
| Number of pages: | 3 |
| Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
| Publicationlist: | Partel, Stefan |
