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Monolithically integrated, CMOS-compatible SiN photonics for sensing applications

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Author:Martin Sagmeister, Günther Koppitsch, Paul Muellner, Stefan Nevlacsil, Alejandro MaeseNovo, Rainer Hainberger, Dana Seyringer, Jochen Kraft
DOI:https://doi.org/10.3390/proceedings2131023
Parent Title (English):Proceedings
Document Type:Article
Language:English
Year of publication:2018
Release Date:2019/08/01
Tag:AWG; OCT; Si3N4 waveguides; optical waveguides; photonics
Volume:2. Jg
Issue:H. 13: Eurosensors 2018. Graz, Austria. 9-12 September 2018
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Publicationlist:Seyringer, Dana