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Ultrashort pulse laser dicing of thin Si wafers. The influence of laser-induced periodic surface structures on the backside breaking strength

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Author:Matthias Domke, Bernadette Egle, Giovanni Piredda, Sandra StrojORCiD, Gernot Fasching, Marius Bodea, Elisabeth Schwarz
DOI:https://doi.org/10.1088/0960-1317/26/11/115004
ISSN:0960-1317
Parent Title (English):Journal of Micromechanics and Microengineering
Document Type:Article
Language:English
Year of publication:2016
Release Date:2018/11/22
Volume:26. Jg.
Issue:H. 11
Number of pages:7
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Forschung / Josef Ressel Zentrum für Materialbearbeitung
Publicationlist:Domke, Matthias
Piredda, Giovanni
Stroj, Sandra