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Femtosecond laser quantized structuring in thin SiOx film. Paper STh3Q.4

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Author:Stephen Ho, Matthias Domke, David Roper, Heinz Huber, Peter R. Herman
Parent Title (English):Conference on Lasers and Electro-Optics (2016). CLEO: Science and Innovations. San Jose, California United States. 5–10 June 2016
Publisher:Optical Society of America
Document Type:Conference Proceeding
Year of publication:2016
Release Date:2018/11/22
Tag:Femtosecond phenomena; Laser materials processing; Subwavelength structures; nanostructures
Number of pages:2
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Forschung / Josef Ressel Zentrum für Materialbearbeitung
Publicationlist:Domke, Matthias