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Laser micro machining of 3C-SiC single crystals

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Author:Sandra Zoppel, Maria Farsari, Robert Merz, Johann Zehetner, Günther Stangl, Georg A. Reider, Costas Fotakis
DOI:https://doi.org/10.1016/j.mee.2006.01.064
Parent Title (English):Microelectronic Engineering
Document Type:Article
Language:English
Year of publication:2006
Release Date:2020/12/21
Tag:Distributed feedback lasers; Dye lasers; Excimer lasers; Laser ablation; Laser beam machining
Volume:83. Jg.
Issue:H. 4-9: Micro- and Nano-Engineering MNE 2005. Vienna, Austria. 19-22 September 2005
First Page:1400
Last Page:1402
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
DDC classes:500 Naturwissenschaften und Mathematik / 530 Physik
Open Access?:nein
Peer review:wiss. Beitrag, peer-reviewed
Publicationlist:Stroj, Sandra
Zehetner, Johann
Merz, Robert