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Minimizing the surface roughness for silicon ablation with ultrashort laser pulses

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Metadaten
Author:Matthias Domke, Giovanni Piredda, Johann ZehetnerORCiD, Sandra StrojORCiD
Parent Title (English):Proceedings of LAMP2015 - the 7th International Congress on Laser Advanced Materials Processing
Document Type:Conference Proceeding
Language:English
Year of publication:2015
Release Date:2018/11/22
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Forschung / Josef Ressel Zentrum für Materialbearbeitung
Publicationlist:Domke, Matthias
Piredda, Giovanni
Stroj, Sandra
Zehetner, Johann