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Design and simulation of Si/SiO2/SiN waveguides structure

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Author:Jozef Chovan, Frantisek Uherek, Daniel Figura, Dana Seyringer, Lenka Gajdosova
Parent Title (English):Proceedings of ADEPT. 6th International Conference on Advances in Electronic and Photonic Technologies. Tatranska Lomnica, High Tatras, Slovakia. June 18 - 21, 2018
Publisher:Institute of Electriconics and Photonics, FEI STU
Place of publication:Bratislava
Editor:Juraj Nevrela, Michal Micjan, Miroslav Novota, Jaroslav Kovac
Document Type:Conference Proceeding
Year of publication:2018
First Page:160
Last Page:163
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Publicationlist:Gajdosova, Lenka
Seyringer, Dana