Innovative method to suppress local geometry distortions for fabrication of interdigitated electrode arrays with nano gaps
| Author: | Stefan Partel, Gerald Urban |
|---|---|
| Parent Title (English): | Optical Microlithography. 23–25 February 2016. San Jose, California, United States |
| Publisher: | SPIE |
| Place of publication: | Bellingham, Wash. |
| Editor: | Andreas Erdmann, Jongwook Kye |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of publication: | 2016 |
| Release Date: | 2018/11/22 |
| Number of pages: | 8 |
| Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
| Publicationlist: | Partel, Stefan |
