Volltext-Downloads (blau) und Frontdoor-Views (grau)
  • search hit 2 of 3
Back to Result List

Bulk micromachining of SiC substrate for MEMS sensor applications

Export metadata

Additional Services

Share in Twitter Search Google Scholar
Metadaten
Author:Gabriel Vanko, Peter Hudek, Johann Zehetner, Jaroslav Dzuba, Pavlina Choleva, Vladimir Kutis, Martin Vallo, Ivan Ryger, Tibor Lalinsky
DOI:https://doi.org/10.1016/j.mee.2013.01.046
ISSN:0167-9317
Parent Title (English):Microelectronic Engineering
Document Type:Article
Language:English
Year of publication:2013
Release Date:2018/11/22
Tag:AlGaN/GaN HEMT; Bulk micromachining; Laser ablation; SiC MEMS
Volume:o. Jg.
Issue:Bd. 110
First Page:260
Last Page:264
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Publicationlist:Zehetner, Johann