Volltext-Downloads (blau) und Frontdoor-Views (grau)
The search result changed since you submitted your search request. Documents might be displayed in a different sort order.
  • search hit 3 of 3
Back to Result List

Micromachined pressure sensors based on AlGaN/GaN circular HEMT sensing devices. Poster

Export metadata

Additional Services

Search Google Scholar
Metadaten
Author:Tibor Lalinsky, Peter Hudek, Gabriel Vanko, Pavlina Choleva, Martin Vallo, Milan Drzik, Jaroslav Dzuba, Vladimir Kutis, Ladislav Matay, Ivan Kostic
Parent Title (English):MNE 2011 (Micro- and Nano Engineering Conference), Berlin, Germany, September 19 – 23, 2011
Document Type:Conference Proceeding
Language:English
Year of publication:2011
Release Date:2018/11/22
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik