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Micro structuring of bulk SiC substrates by femtosecond laser ablation

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Metadaten
Author:Johann Zehetner, Gabriel Vanko, Jaroslav Dzuba, Tibor Lalinsky, Michal Lucki, Stanislav Kraus
Parent Title (English):Proceedings of the 22nd International Conference on Applied Physics of Condensed Matter (APCOM 2016). June 22 - 24, 2016. Hotel Patria, Strbske Pleso, Slovak Republic
Publisher:Slovenska Technicka Univerzita
Place of publication:Bratislava
Editor:Jan Vajda, Igor Jamnicky
Document Type:Conference Proceeding
Language:English
Year of publication:2016
Release Date:2018/11/22
First Page:302
Last Page:306
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Publicationlist:Zehetner, Johann