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MEMS pressure sensor fabricated by advanced bulk micromachining techniques

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Author:Gabriel Vanko, Peter Hudek, Johann Zehetner, Jaroslav Dzuba, Pavlina Choleva, Martin Vallo, Ivan Ryger, Tibor Lalinsky
Parent Title (English):Smart sensors, actuators, and MEMS VI. 24-26 April 2013. Grenoble, France
Publisher:SPIE
Place of publication:Bellingham, Wash.
Editor:Ulrich Schmid, Jose Luis Sanchez de Rojas Aldavero, Monika Leester-Schaedel
Document Type:Conference Proceeding
Language:English
Year of publication:2013
Release Date:2018/11/22
Number og pages:87632
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Publicationlist:Zehetner, Johann